- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/52 - Means for observation of the coating process
Patent holdings for IPC class C23C 14/52
Total number of patents in this class: 106
10-year publication summary
11
|
13
|
7
|
9
|
8
|
10
|
14
|
8
|
12
|
4
|
2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Applied Materials, Inc. | 16587 |
13 |
ULVAC, Inc. | 1448 |
7 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
5 |
Samsung Display Co., Ltd. | 30585 |
4 |
Nitto Denko Corporation | 7879 |
3 |
Boe Technology Group Co., Ltd. | 35384 |
3 |
Mochii, Inc. | 16 |
3 |
LG Electronics Inc. | 69257 |
2 |
Tokyo Electron Limited | 11599 |
2 |
Arcam AB | 204 |
2 |
Chengdu BOE Optoelectronics Technology Co., Ltd. | 4805 |
2 |
Entegris, Inc. | 1736 |
2 |
Lamina Technologies S.A. | 12 |
2 |
Leybold Optics GmbH | 55 |
2 |
Singulus Technologies AG | 88 |
2 |
Viavi Solutions Inc. | 1363 |
2 |
Halliburton Energy Services, Inc. | 20165 |
1 |
Panasonic Corporation | 20786 |
1 |
Varian Semiconductor Equipment Associates, Inc. | 1282 |
1 |
Applied Materials Israel, Ltd. | 549 |
1 |
Other owners | 46 |